音圈级提供亚微米定位

VCS-2020音圈级直径为3 / 4英寸。全封闭系统中的孔径

通过资料来源:Equipment Solutions Inc。 2011年4月5日

Equipment Solutions的VCS-2020音圈级直径为3 / 4英寸。孔径和交叉辊音圈级是独立的,紧凑的,并可以安装在一个水平或垂直轴。这种紧凑的音圈级是理想的微定位应用,如:扫描干涉测量,磁盘驱动器测试,自动对焦系统,表面结构分析,共聚焦显微镜,生物技术和半导体测试设备。

音圈级,尺寸为4.60英寸。差2.96英寸。3.18英寸。,is a fully self-contained system including a high precision cross roller stage, voice coil actuator, analog position sensor, servo amplifier and servo controller. The low inertia cross roller stage is integral to the standard threaded "C" lens mount and motor coil for tip/tilt free motion. Custom lens mounts are available. The voice coil motor is rated at 4 lbs. continuous force and 16 lbs. peak for 10 seconds and is clean room compatible. For easy integration into a new or existing application the VCS-10H Voice Coil Stage has multiple sets of mounting holes on several surfaces.

www.equipsolutions.com

Equipment Solutions, Inc. (ESI)

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