Linear XY stepper
20-mil pitch XY linear stepper improves accuracy and cycle time over existing technology used in wafer probers. With microstep resolutions of approximately 1 µm, the air bearing stage is suited for high-accuracy semiconductor manufacturing and test. Stepper does not exhibit oscillations so that secondary operations such as trimming, test, or inspection can be carried out rapidly on a stabl...
20-mil pitch XY linear stepper improves accuracy and cycle time over existing technology used in wafer probers. With microstep resolutions of approximately 1previous models.
Baldor Electric Co.
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